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  4. Precision optical coatings on large substrates by reactive magnetron sputtering
 
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2016
Conference Paper
Titel

Precision optical coatings on large substrates by reactive magnetron sputtering

Abstract
The upscaling of highly productive coating technologies for precison optics and appropriate equipment will be presented. The application for e.g. gradient coatings or special coatings for holographic 3D-displays will be shown.
Author(s)
Frach, P.
Glöß, D.
Bartzsch, H.
Goschurny, T.
Drescher, A.
Gottfried, C.
Liebig, J.-S.
Hauptwerk
Optical Interference Coatings 2016
Konferenz
Conference" Optical Interference Coatings" (OIC) 2016
Thumbnail Image
DOI
10.1364/OIC.2016.WA.11
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
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