Novel SThM nanoprobe for thermal properties investigation of micro- and nanoelectronic devices

In this paper, we present a novel micromachined Atomic Force Microscopy (AFM) micro-cantilever equipped with a sharp, conductive platinum tip. The processing sequence proposed in this article integrates a high reproducibility and precise post-processing applying Focused Ion Beam tip modification. The cantilever is designed for Scanning Thermal Microscopy (SThM) applications in a standard setup with the optical AFM detection system.