Optimization of Ultraclean Gas Supply Systems

The testing method developed offers the possibility of testing a variety of ultra-pure gas supply components (valves, filters, pressure-reducers, etc.) even under instationary working conditions. A large number of tests were carried out over the last few years by the Fraunhofer IPA. With the information obtained, manufacturers of gas supply components and systems were able to improve their products with regard to lowest possible particle entry.