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Modelling of three dimensional deep trench capacitors and identification of parasitic elements
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2020
Master Thesis
Title
Modelling of three dimensional deep trench capacitors and identification of parasitic elements
Thesis Note
Dresden, TU, Master Thesis, 2020
Author(s)
Agarwal, Rishabh
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Advisor(s)
Czernohorsky, Malte
Lakner, Hubert
Bartha, J.W.
Publishing Place
Dresden
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
