MOEMS based scanning grating facilitates miniaturization and tuning speed enhancement of an EC-QCL towards a µEC-QCL for real time spectroscopic sensing

The combination of an external cavity quantum cascade laser with a MOEMS based scanning diffraction grating of 1 kHz resonance frequency and its electrostatic drive is described. The characteristics of the MOEMS scan module as well as of the entire µEC-QCL like spectral line width and wavelength reproducibility are shown. Finally the µEC-QCL is used as light source for real time spectroscopic sensing of polystyrene and carbon monoxide. Article not available.