1994
Conference Paper
Title

Fabrication of electrode arrays in the quarter micron regime for biotechnical applications

Title Supplement
Siehe auch: Sensors and Actuators, A 46(1995), S.66-70
Author(s)
Reimer, K.
Hintsche, R.
Köhler, C.
Lisec, T.
Schnakenberg, U.
Wagner, B.
Fuhr, G.
Mainwork
Conference
Language
English