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Prospects for the realization of APC in a distributed 300 mm R&D-line
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2006
Conference Paper
Titel
Prospects for the realization of APC in a distributed 300 mm R&D-line
Author(s)
Roeder, G.
Schellenberger, M.
Öchsner, R.
Pfeffer, M.
Frickinger, J.
Pfitzner, L.
Ryssel, H.
Fritzsche, M.
Hauptwerk
7th European Advanced Equipment Control, Advanced Process Control, AEC/APC 2006. Conference Proceedings. CD-ROM
Konferenz
European Advanced Equipment Control / Advanced Process Control Conference (AEC/APC Europe) 2006
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
Tags
APC
300 mm
multi-site processing
