English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Prospects for the realization of APC in a distributed 300 mm R&D-line
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
2006
Conference Paper
Title
Prospects for the realization of APC in a distributed 300 mm R&D-line
Author(s)
Roeder, G.
Schellenberger, M.
Öchsner, R.
Pfeffer, M.
Frickinger, J.
Pfitzner, L.
Ryssel, H.
Fritzsche, M.
Mainwork
7th European Advanced Equipment Control, Advanced Process Control, AEC/APC 2006. Conference Proceedings. CD-ROM
Conference
European Advanced Equipment Control / Advanced Process Control Conference (AEC/APC Europe) 2006
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
Keyword(s)
APC
300 mm
multi-site processing
