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Carbon thin films
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1986
Book Article
Title
Carbon thin films
Author(s)
Angus, J.C.
Domitz, S.
Koidl, P.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF
Mainwork
Plasma Deposited Thin Films. Chapter 4
Language
English
Fraunhofer-Institut für Angewandte Festkörperphysik IAF
Keyword(s)
amorpher Kohlenstoff
Dünnschicht
