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2017
Conference Paper
Titel

Design of a 2D MEMS micromirror with indirect static actuation

Abstract
We present the design of a 2D MEMS micromirror with indirect static actuation based on gyroscopic effects. Additionally to the primary resonant oscillation we introduce a second one, disturbing the angular momentum of the former. This under special conditions leads to a directed torque about a third axis. This concept thus uses only resonant actuation by still enabling static deflection, potentially being more energy efficient compared to current technologies. After discussion of the used manufacturing process, the MEMS design workflow and the resulting fully functional micromirror design is shown. In first experimental results we then show a proof of concept for the manufactured micromirror devices.
Author(s)
Kaupmann, P.
Pinter, S.
Franz, J.
Streiter, R.
Otto, T.
Hauptwerk
IEEE Sensors 2017. Conference Proceedings
Konferenz
Sensors Conference 2017
Thumbnail Image
DOI
10.1109/ICSENS.2017.8234252
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS
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