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  4. Quality assessment of precision optical surfaces through light scattering techniques
 
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2012
Conference Paper
Title

Quality assessment of precision optical surfaces through light scattering techniques

Abstract
Light scattering methods are extremely capable for the characterization of optical surfaces. This will be demonstrated for different applications ranging from anisotropic diamond-turned surfaces to polished surfaces exhibiting defects.
Author(s)
Schröder, Sven  
Finck, Alexander von
Herffurth, Tobias  
Duparré, Angela  
Mainwork
Optical Fabrication and Testing  
Conference
Conference "Optical Fabrication and Testing" (OFT) 2012  
DOI
10.1364/AIO.2012.JTu5A.10
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
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