• English
  • Deutsch
  • Log In
    Password Login
    Research Outputs
    Fundings & Projects
    Researchers
    Institutes
    Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Konferenzschrift
  4. Roll-to-roll technology for transparent high barrier films
 
  • Details
  • Full
Options
2008
Conference Paper
Title

Roll-to-roll technology for transparent high barrier films

Abstract
A novel concept for the all-in-vacuum, roll-to-roll deposition of multilayer barrier stacks has been presented. The basis of the concept is the in-line combination of magnetron sputtering and a magnetron PECVD-process. The magnetron PECVD process offers several benefits low working pressure of 0.5 Pa up to few Pa, thus allowing the in-line combination with sputtering process wide range of properties for SiO xC y layers high potential for large area processing by using dual magnetrons as power source high coating rates (> 400 nmm/min) Our basic concept allows an all-in-vacuum roll-to-roll deposition of multilayer barrier stacks. The process has been installed in a pilot-cale multi-chamber pilot roll to roll coater.
Author(s)
Schiller, N.
Fahlteich, J.
Fahland, M.
Schönberger, W.
Mainwork
Association of Industrial Metallizers, Coaters and Laminators Fall Technical Conference and 22nd International Vacuum Web Coating Conference 2008. Vol.2  
Conference
Association of Industrial Metallizers, Coaters and Laminators (Fall Technical Conference) 2008  
Language
English
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP  
  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Contact
© 2024