Piezoresistive diamond-like carbon micro strain gauges

Hydrogenated (a-C:H) and hydrogen-free (a-C) amorphous diamond-like carbon (DLC) strain gauges have been successfully integrated on micromachined silicon bossmembrane force sensors. DLC strain gauges were investigated under vertical and horizontal connection as well as longitudinal and transversal orientation at temperatures between RT and 60°C revealing piezoresistive gauge factors typically in the range of 50-90 (a-C:H) and 20-30 (a-C).