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Correlation between structure and properties of reactively deposited Al2O3 coatings by pulsed magnetron sputtering
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1997
Conference Paper
Title
Correlation between structure and properties of reactively deposited Al2O3 coatings by pulsed magnetron sputtering
Author(s)
Zywitzki, O.
Hötzsch, G.
Mainwork
24th International Conference on Metallurgical Coatings and Thin Films 1997. Papers
Conference
International Conference on Metallurgical Coatings and Thin Films 1997
DOI
10.1016/S0257-8972(97)00341-1
Language
English
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP
