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Stress chip measurements during temperature cycling test
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2014
Book Article
Title
Stress chip measurements during temperature cycling test
Author(s)
Schindler-Saefkow, Florian
Rost, F.
Otto, Alexander
Keller, J.
Michel, Bernd
Rzepka, Sven
Mainwork
Smart systems integration for micro- and nanotechnologies
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS