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Silicon-silicon anodic bonding with intermediate glass layers using spin-on glasses
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1996
Conference Paper
Title
Silicon-silicon anodic bonding with intermediate glass layers using spin-on glasses
Author(s)
Quenzer, H.J.
Dell, C.
Wagner, B.
Mainwork
International Workshop on Micro-Electro-Mechanical Systems 1996. Proceedings
Conference
International Workshop on Micro-Electro-Mechanical Systems (MEMS) 1996
DOI
10.1109/MEMSYS.1996.493993
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
