Development of piezoelectrically driven quasi-static 2D MEMS mirrors for extremely large FoV for scanning LiDAR Entwicklung von piezoelektrisch betriebenen quasi-statischen 2D MEMS-Spiegeln mit extrem hohem FoV für scanning LiDAR

The amount of data produced by sensing elements, especially in the fourth industrial revolution, leads to large computing intensity and energy consumption. To reduce both in the human-machine-collaboration, a promising solution is investigated. A MEMS-scanning based light detection and ranging (LiDAR) system is combined with neuromorphic sensing elements to accelerate the procession of measurement data. In this work a piezoelectrically driven quasi-static MEMS-mirror is developed. Finite element method (FEM) simulation is used to optimize the design of the MEMS-mirror. A special focus is on the shape and thickness of the actuators and springs. Those are optimized to reach a maximum static total optical scanning angle (TOSA). Its influence on the resonance frequency at dynamic modes and the material stress are investigated. Based on the optimization, two of the eight developed designs are compared to each other. Currently, the devices are manufactured in the cleanroom. The experimental characterization of the MEMS-mirrors will be published in future works.