1998
Conference Paper
Title

Comparative study of polysilicon-on-oxide using spectroscopy ellipsometry, atomic force microscopy and transformation electron microscopy

Author(s)
Petrik, P.
Fried, M.
Lohner, T.
Berger, R.
Biro, L.P.
Schneider, C.
Ryssel, H.
Gyulai, J.
Mainwork
Conference
Language
English