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Automation in semiconductor-production. Minienvironments, flexibilty and information-flow
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1995
Conference Paper
Title
Automation in semiconductor-production. Minienvironments, flexibilty and information-flow
Author(s)
Dudde, R.
Staudt-Fischbach, P.
Herzog, O.
Mainwork
Process, equipment, and materials control in integrated circuit manufacturing
Conference
Conference "Process, Equipment, and Materials Control in Integrated Circuit Manufacturing" 1995
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
