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  4. Influence of a Ti-interlayer on the adhesion of TiN-coatings
 
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1994
Conference Paper
Title

Influence of a Ti-interlayer on the adhesion of TiN-coatings

Author(s)
Lunow, T.
Bücken, B.
Cernohorsky, H.
Leonhardt, G.
Sommer, J.-P.
Mainwork
TATF '94. 4th International Symposium on Trends and new Applications in Thin Films. Proceedings  
Conference
International Symposium on Trends and New Applications in Thin Films (TATF) 1994  
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
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