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Influence of a Ti-interlayer on the adhesion of TiN-coatings
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1994
Conference Paper
Title
Influence of a Ti-interlayer on the adhesion of TiN-coatings
Author(s)
Lunow, T.
Bücken, B.
Cernohorsky, H.
Leonhardt, G.
Sommer, J.-P.
Mainwork
TATF '94. 4th International Symposium on Trends and new Applications in Thin Films. Proceedings
Conference
International Symposium on Trends and New Applications in Thin Films (TATF) 1994
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM