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Free 3D shaping with grey-tone lithography and multidose e-beam writing
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1998
Conference Paper
Title
Free 3D shaping with grey-tone lithography and multidose e-beam writing
Author(s)
Kalus, M.
Frey, M.
Buchmann, L.-M.
Reimer, K.
Wagner, B.
Mainwork
Micro- and nanoengineering 97 - MNE. Proceedings of the International Conference on Micro- and Nanofabrication 1997
Conference
International Conference on Micro- and Nanofabrication (MNE) 1997
Language
English
IFT
Fraunhofer-Institut für Siliziumtechnologie ISIT
