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  4. Protected and enhanced aluminum mirrors for the VUV
 
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2013
Conference Paper
Title

Protected and enhanced aluminum mirrors for the VUV

Abstract
Aluminum layers protected with fluoride coatings have been deposited and characterized with respect to their suitability as VUV mirrors. Particularly protection with Aluminum fluoride results in superior VUV reflection properties.
Author(s)
Wilbrandt, Steffen  
Stenzel, Olaf  
Nakamura, Hiroshi
Kaiser, Norbert  
Mainwork
Optical Interference Coatings (OIC) 2013. OSA Topical Meeting. Technical digest. CD-ROM  
Conference
Topical Meeting "Optical Interference Coatings" (OIC) 2013  
DOI
10.1364/OIC.2013.FC.6
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
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