Layer-thickness measurements with incoherent terahertz light

We recently demonstrated the use of incoherent light from a superluminescent diode to drive a terahertz crosscorrelation spectroscopy system. Its application to layer-thickness measurement tasks is the scope of this contribution. The limitations and a comparison to layer-thickness measurements with a standard time-domain spectroscopy system is discussed with a special focus of the bandwidth-dependence of the layer-thickness evaluation result.