2015
Journal Article
Title

Experimental and Theoretical Investigations on an in situ k-restore Process with Plasma Enhanced Fragmentation for Damaged ULK Materials

Title Supplement
Abstract
Author(s)
Foerster, A.
Köhler, Nicole
Zimmermann, Sven
Fischer, Tobias  
Wagner, Christian Friedemann  orcid-logo
Schuster, Jörg  
Gemming, S.
Schulz, Stefan E.  
Geßner, Thomas  
Journal
Conference
Language
English