2009
Conference Paper
Title

Improvement of etch processes for SiCOH materials with novel in situ diagnostic and evaluation methods

Author(s)
Zimmermann, Sven
Ahner, N.
Blaschta, F.
Schaller, M.
Zimmermann, H.
Rülke, H.
Lang, N.
Röpcke, J.
Schulz, Stefan E.  
Geßner, Thomas  
Mainwork
Conference
Language
English