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Simulation of sheath dynamics and current nonuniformity in plasma-immersion ion implantation of a patterned surface
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2003
Journal Article
Title
Simulation of sheath dynamics and current nonuniformity in plasma-immersion ion implantation of a patterned surface
Author(s)
Briehl, B.
Urbassek, H.M.
Journal
Journal of applied physics
DOI
10.1063/1.1555682
Language
English
Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM
