Novel MWIR microspectrometer based on a tunable detector

In this paper we present basic designs, operation concepts and some application examples of a novel microspectrometer for the spectral range of 3-5?m, which is based on a pyroelectric detector with an integrated micromachined Fabry-Perot filter (FPF). We discuss the influence of different optical setups on the spectral resolution and the signal-to-noise ratio of the microspectrometer. Two basic operation modes, step scan mode and continuous sweep mode are demonstrated. Such a device has a large potential in the field of infrared absorption spectroscopy, particularly if multicomponent mixtures have to be analyzed.