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Influence of process parameters on the structure and the properties of ZrO2 coatings deposited by reactive pulsed magnetron sputtering (PMS)
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2000
Journal Article
Title
Influence of process parameters on the structure and the properties of ZrO2 coatings deposited by reactive pulsed magnetron sputtering (PMS)
Author(s)
Goedicke, K.
Liebig, J.-S.
Zywitzki, O.
Sahm, H.
Journal
Thin solid films
Conference
International Conference on Metallurgical Coatings and Thin Films 2000
DOI
10.1016/S0040-6090(00)01381-X
Language
English
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP
