2010
Conference Paper
Title

Lamellar grating based mems fourier transform spectrometer

Abstract
A Lamellar grating interferometer based Fourier Transform Infrared Spectrometer (FTIR) with out-of-plane resonant mode is implemented and characterized. Device has 10mm2 clear aperture. Dynamic diffraction grating is comb-actuated and a maximum p-p deflection of 355 m is obtained at 76 V. The excitation frequency is 971 Hz and deflection frequency of 485.5Hz.
Author(s)
Seren, H.R.
Ayerden, N.P.
Sharma, J.
Holmström, S.T.S.
Sandner, T.
Grasshoff, T.
Schenk, H.
Urey, H.
Mainwork
Conference
Open Access
DOI
Additional link
Language
English