1987
Conference Paper
Title

Self-aligned waveguide mirrors for optical integration on InGaAsP/InP

Abstract
Totally reflecting mirrors for monomode rib waveguides in InGaAsP/InP were fabricated by reactive ion etching using a self-aligning technique. For eight mirrors in series an average excess loss of 1.5 dB per mirror was observed. The loss mechanisms are discussed.
Author(s)
Albrecht, P.
Doldissen, W.
Niggerbrugge, U.
Nolting, H.P.
Schmid, H.
Mainwork
Conference
Language
English
Keyword(s)