Nanocrystalline diamond microelectromechanical resonators

Nanocrystalline diamond (NCD) microelectromechanical resonators are presented. The NCD layers were prepared by chemical vapour deposition and the fabricated devices were characterised by magnetomotive resonance. The resonant frequencies of the different flexural modes of several structures were measured in vacuum and ambient pressure conditions. Both analytical and numerical models have been employed to fit the measured data and extract the NCD material parameters, obtaining an acoustic velocity as high as 17283 ± 232 m/s. The mechanical properties, quality factors and damping mechanisms will be discussed.