Eigenspannungen in der Dünnschichttechnik

A short survey on the problems connected with internal stresses in thin films is given. The following topics are dealt with: the effects of internal stresses on behaviour under mechanical or corrosive loading conditions, measurement methods, the formation of internal stresses. The pecularities of stresses in films deposited by CVD and PVD processes are discussed. The illustrating examples refer especially to hard coatings.