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1996
Journal Article
Title

Dünne Schichten zerstörungsfrei prüfen

Other Title
Nondestructive testing of thin films
Abstract
The feasible characterization of layer materials is decisive for optimizing the surface properties and for quality assurance. The module of elasticity and/or density of thin and very thin layers down to 100 nanometres can be determined quickly and reliably by means of high-frequency ultrasonic surface wave., excited by short laser pulses
Author(s)
Schneider, D.
Schultrich, B.
Journal
Materialprüfung  
Language
German
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Keyword(s)
  • Laser-Akustik

  • Ultraschall

  • Schicht

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