MlLOS: The approach to Micro-Assembly

The autornation of rnicro assembly is becoming more anq more important in micro technology, Especially the demands concemjng handling and process observation of hybrid micro systems with optical and mechanical functions are quite high. Thus, Process rnonitoring is inevitably necessary for a better understanding of what is really happening in the micro world. Process visualisation is very important in MEMS but does not guarantee an operative micro system. Therefore, Instruments for quality control are required to secure a safe and reproducible assembly. The hybrid assembly of micro Systems makes great demands on the quality control and process observation. Different components and materials and the various dimensions of the assernbled parts, require a flexible inspection System which is equipped with different sensors to cover the whole range of measurement tasks. Therefore the idea Of a modular in-line observation System (MILOS) is presented.