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  4. Polymer BioMEMs with integrated optical and fluidic functionality
 
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2003
Conference Paper
Title

Polymer BioMEMs with integrated optical and fluidic functionality

Author(s)
Windhorn, K.
Meixner, L.
Drost, S.
Schröder, H.
Kilgus, E.
Scheel, W.
Ebling, F.
Otto, Thomas  
Küchler, Matthias
Nestler, J.
Geßner, Thomas  
Mainwork
Micro System Technologies 2003  
Conference
International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components 2003  
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS  
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