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  4. On the use of Si-based nanohole arrays as near-field biochips
 
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2002
Journal Article
Title

On the use of Si-based nanohole arrays as near-field biochips

Abstract
Near-field biochips based on nanohole arrays produced in silicon wafers are described and the first studies of cells and DNA with the help of a laser scanning microscope are presented.
Author(s)
Eberle, H.-G.
Dressler, C.
Oertel, H.
Beuthan, J.
Müller, G.
Journal
Quantum electronics. A translation of the journal Kvantovaya elektronika  
DOI
10.1070/QE2002v032n11ABEH002335
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT  
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