Enhanced performance of polymer waveguides by replication and uv-patterning in ORMOCER

Recent results on waveguide device fabrication by replication of inorganic copolymers (ORMOCERs) are presented. The use of optimized ORMOCER resins offers advantages over conventional organic polymers. The organic as well as inorganic crosslinking is responsible to high thermal and chemical stability and thus an improved stability of the waveguide devices. Fluorination of ORMOCER side chains reduces the NIR absorption to <0.1 dB/cm at 1.55 mu m and <0.3 dB/cm at 1.3 mu m. Furthermore, the synthesis of purely inorganically crosslinking CH-free ORMOCER is possible. The refractive index can be turned so that highly fluorinated core material can be combined with low-cost unfluorinated cladding material. The influence of the sidewall roughness of replication tools on scattering losses is investigated, and methods to fabricate smooth original structures have been developed leading to an additional scattering loss <O. 1 dB/cm in single-mode strip waveguides even at visible wavelengths. Furthe rmore, an improved deforming behaviour is achieved. UV-patterning by uv-induced crosslinking is a second waveguide fabrication method used in ORMOCERs in thermooptical switching nodes are discussed.