2025
Conference Paper
Title

Study of Optical Losses in SiNx and SiOxNy Coatings Deposited by Plasma-enhanced Chemical Vapour Deposition for Gravitational Wave Detection

Abstract
Gravitational wave detectors rely on low mechanical and optical loss mirror coatings. This work discusses optical losses through absorption and light scattering mechanisms in SiNx and SiOxNy coatings deposited by plasma-enhanced chemical vapour deposition.
Author(s)
Saunders, Kirstin
University of Glasgow
Herfurth, Tobias
Fraunhofer-Institut für Produktionsanlagen und Konstruktionstechnik IPK  
Bublitz, Simon
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Mühlig, Christian
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Munser, Anne-Sophie
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Gibson, Des
University of the West of Scotland
Clark, Caspar
University of the West of Scotland
Nunez, Carlos García
University of Glasgow
Schröder, Sven  
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Mainwork
Conference
Open Access
DOI
Additional link
Language
English