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Design support and development of miniaturised Si-microphone packages
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2004
Conference Paper
Title
Design support and development of miniaturised Si-microphone packages
Author(s)
Sommer, J.-P.
Mainwork
Joint Congress CFA/DAGA '04. Proceedings. Vol.1
Conference
Congrès Francais d'Acoustique (CFA) 2004
Deutsche Jahrestagung für Akustik (DAGA) 2004
Salon Europèen de l'Acoustique 2004
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
