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Actual trends in patents on plasma and surface engineering
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2009
Conference Paper
Title
Actual trends in patents on plasma and surface engineering
Author(s)
Bethke, R.
Rager, B.
Diehl, W.
Mainwork
Society of Vacuum Coaters. 52nd Annual Technical Conference 2009. Proceedings
Conference
Society of Vacuum Coaters (Annual Technical Conference) 2009
Language
English
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST
