Smart Platform for Rapid Prototyping: A First Solution Approach to Improve Time-to-Market and Process Control in Low-Volume Device Fabrication

Fraunhofer IISB offers prototyping services for electron devices. Such prototyping builds on proven processes and designs, amending them with customer-specific specifications and additions. The challenge is to efficiently combine existing expertise and proven process/device modules with ""on the fly"" R&D results and novel findings. In this paper, we present a first solution approach for a smart platform for rapid prototyping in order to improve time-to-market in low-volume device fabrication. This solution covers research of a digital twin for optimized management of wafer containers, development of intelligent algorithms for process and equipment control as well as a novel approach for ""smart experiments"" to achieve an accelerated transfer of process development to ISO-certified production.