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Ruthenocenes and half-open ruthenocenes: Synthesis, characterization, and their use as CVD precursors for ruthenium thin film deposition
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2012
Journal Article
Title
Ruthenocenes and half-open ruthenocenes: Synthesis, characterization, and their use as CVD precursors for ruthenium thin film deposition
Author(s)
Tuchscherer, A.
Georgi, C.
Roth, N.
Schaarschmidt, D.
Rüffer, T.
Waechtler, T.
Schulze, S.E.
Oswald, S.
Geßner, Thomas
Lang, H.
Journal
European journal of inorganic chemistry
DOI
10.1002/ejic.201200601
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS