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  4. Ruthenocenes and half-open ruthenocenes: Synthesis, characterization, and their use as CVD precursors for ruthenium thin film deposition
 
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2012
Journal Article
Title

Ruthenocenes and half-open ruthenocenes: Synthesis, characterization, and their use as CVD precursors for ruthenium thin film deposition

Author(s)
Tuchscherer, A.
Georgi, C.
Roth, N.
Schaarschmidt, D.
Rüffer, T.
Waechtler, T.
Schulze, S.E.
Oswald, S.
Geßner, Thomas  
Lang, H.
Journal
European journal of inorganic chemistry  
DOI
10.1002/ejic.201200601
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS  
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