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Anode effects on energetic particle bombardment of the substrate in pulsed magnetron sputtering
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2000
Journal Article
Title
Anode effects on energetic particle bombardment of the substrate in pulsed magnetron sputtering
Author(s)
Bartzsch, H.
Frach, P.
Goedicke, K.
Journal
Surface and coatings technology
Conference
International Conference on Plasma Surface Engineering 2000
DOI
10.1016/S0257-8972(00)00861-6
Language
English
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
