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Spark source mass spectrometry on silicon for solar cells
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1981
Book Article
Title
Spark source mass spectrometry on silicon for solar cells
Other Title
Funkenmassenspektrometrie an Silizium fuer Solarzellen
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Author(s)
Hurrle, A.
Dietl, J.
Mainwork
Proceedings of the symposia on electronic and optical properties of polycrystalline or impure semiconductors and novel silicon growth methods. Vol.80-5
Language
English
Fraunhofer-Institut für Solare Energiesysteme ISE
Keyword(s)
Funkenmassenspektrometrie
Massenspektrometrie
Silizium
Solarzelle
Spurenanalyse