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  4. Spark source mass spectrometry on silicon for solar cells
 
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1981
Book Article
Title

Spark source mass spectrometry on silicon for solar cells

Other Title
Funkenmassenspektrometrie an Silizium fuer Solarzellen
Author(s)
Hurrle, A.
Dietl, J.
Mainwork
Proceedings of the symposia on electronic and optical properties of polycrystalline or impure semiconductors and novel silicon growth methods. Vol.80-5  
Language
English
Fraunhofer-Institut für Solare Energiesysteme ISE  
Keyword(s)
  • Funkenmassenspektrometrie

  • Massenspektrometrie

  • Silizium

  • Solarzelle

  • Spurenanalyse

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