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2000
Conference Paper
Title

Hybrid assembly of microoptical systems

Abstract
During the last years micro-optical and opto-electronic systems are in instrumentation and represent a huge potential for miniaturised systems. In these terms different kinds of microlenses and microparts have been used to achieve the desired optical function. One of the most critical obstacles achieving a cost-effective solution of the assembly is the integration of an alignment and positioning process within tolerances of few microns.
Author(s)
Eberhardt, R.
Mohaupt, M.
Scheller, T.
Mainwork
MICRO.tec 2000. VDE World Microtechnologies Congress: Applications - Trends - Visions. Proceedings. Vol.1  
Conference
World Microtechnologies Congress (MICROTEC) 2000  
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Keyword(s)
  • microassembly

  • microoptics

  • alignment

  • hybrid integration

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