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  4. Nanopatterning of magnetic disks by single-step ar+ ion projection
 
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2003
Journal Article
Title

Nanopatterning of magnetic disks by single-step ar+ ion projection

Abstract
Large-area Ar+ projection has been used to generate planar magnetic nanostructures on a 1"-format hard disk in a single step (see Figure). The recording pattern was transferred to a Co/Pt multilayer without resist processes or any other contact to the delicate media surface. It is conceivable that magnetic nanostructures can be replicated from a single stencil mask on large quantities of disks for future high-density recording.
Author(s)
Dietzel, A.
Berger, R.
Loeschner, H.
Platzgummer, E.
Stengl, G.
Bruenger, W.H.
Letzkus, F.
Journal
Advanced Materials  
DOI
10.1002/adma.200304943
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT  
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