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Fabrication of sub-wavelength surface ripples and in-volume nanostructures by fs-laser induced selective etching
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2009
Journal Article
Title
Fabrication of sub-wavelength surface ripples and in-volume nanostructures by fs-laser induced selective etching
Author(s)
Gottmann, J.
Wortmann, D.
Hörstmann-Jungemann, M.
Journal
Applied surface science
Conference
Symposium B "Laser and Plasma in Micro- and Nano-Scale Materials Processing and Diagnostics" 2008
European Materials Research Society (Spring Meeting) 2008
DOI
10.1016/j.apsusc.2008.10.097
Language
English
Fraunhofer-Institut für Lasertechnik ILT
