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Comparison of dilute nitride growth on a single- and 8×4-inch multiwafer MOVPE system for solar cell applications
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2004
Journal Article
Title
Comparison of dilute nitride growth on a single- and 8×4-inch multiwafer MOVPE system for solar cell applications
Author(s)
Dimroth, Frank
Baur, Carsten
Bett, Andreas W.
Volz, Kerstin
Stolz, W.
Journal
Journal of Crystal Growth
DOI
10.1016/j.jcrysgro.2004.08.038
Language
English
Fraunhofer-Institut für Solare Energiesysteme ISE
Keyword(s)
Epitaxie
Epitaxie MOVPE
