Preparation and characterization of Cu'Me"'

Transparent and conductive p-type oxide films are building blocks for the rising field of transparent oxide based electronics. Starting with the discovery of p-type conductivity in CuAlO2 in 1997, the subject of material optimization, device development and large area low temperature synthesis receives considerable interest. This paper addresses the PVD synthesis of CuAlO2 and CuCrO2 thin films by sputterig aiming towards low temperature processes being capable for low cost ceramic substrate materials.