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ENCOTION - A new simulation tool for energetic contamination analysis
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2003
Conference Paper
Title
ENCOTION - A new simulation tool for energetic contamination analysis
Author(s)
Häublein, V.
Frey, L.
Ryssel, H.
Mainwork
Ion implantation technology, IIT 2002
Conference
International Conference on Ion Implantation Technology 2002
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
