2017
Master Thesis
Title

Novel TSV metallization and simplified ECD processes for ultra-large scale integration (ULSI) technology

Thesis Note
Kiel, Univ., Master Thesis, 2017
Author(s)
Esmaeili Dehkalani, M. Sajjad
Advisor(s)
Lilienthal, Katharina  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Adelung, Rainer
Christian-Albrechts-Universität <Kiel, Germany>
Publishing Place
Kiel
Language
English